We report a simple method to obtain a p-i-n photodiode's harmonic dist
ortion levels at different frequencies from the microwave reflection c
oefficient S-11 of the photodiode under de illumination. This approach
is based upon the tracking of the photodiode's microwave impedance wi
th S-11 at different incident optical powers before severe saturation
occurs at low bias or at high optical power. The second-harmonic disto
rtions measured from a waveguide photodiode agree closely with those p
redicted from the S-11 data.