DEMONSTRATION OF A MONOLITHIC MULTICHANNEL MODULE FOR MULTI-GB S INTRA-MCM OPTICAL INTERCONNECTS/

In this letter, we report on the demonstration of a 2.48-Gb/s multicha nnel, optical data-link for intramultichip module interconnects. The o ptical module was fabricated in Poly MethylMethAcrylate (PMMA) by deep proton lithography and monolithically integrates micromirrors and cyl indrical lenses. With the same technology, we have also fabricated a s ingle-channel optical bridge and used this component to demonstrate a proof-of-principle optical intrachip interconnect by establishing a di gital data-link between optoelectronic transceivers integrated on the same chip.