PZT THIN-FILM ACTUATED ELASTIC FIN MICROMOTOR

A piezoelectric elastic fin micromotor based on a PbZr0.53Ti0.47O3 thi n film driving a micromachined silicon membrane was fabricated and stu died. The stator was characterized by interferometry, and a laser set- up was used to measure the angular velocity and acceleration of the mo tor. The torque, the output power, and the efficiency of the device we re extracted from these measurements. Values up to 1020 rpm and 0.94 m u Nm were observed for the velocity and the torque, respectively, whic h would be sufficient for a wristwatch application. The present versio n exhibited an efficiency of 0.17%, which could theoretically be incre ased to 4.8%.