This paper describes a new level of integration and innovation require
d to meet the integrated circuit (IC)- and system-level challenges of
the 21(st) century. We present a technology platform in which chip-sca
le modules (CSMs) provide greater functionality, higher performance, l
ower cost, and faster time to market for many of today's emerging prod
ucts. Our approach is to build CSMs that overcome formidable integrati
on barriers without compromising individual IC technologies. By integr
ating various IC technologies and their supporting components, we exce
ed single on-chip performance. Functionality is increased through inte
gration, and performance is improved by maintenance of an on-chip elec
trical environment. Applications include integrating large blocks of m
emory with logic, mixing analog and digital IC technologies, and integ
rating high-frequency ICs with high-quality (high-Q) passive component
s. The CSM technology platform is poised to unlock the full potential
of IC technology and unleash the innovations of designers.