NONLINEAR PROCESSES IN THE GAS CLUSTER ION-BEAM MODIFICATION OF SOLID-SURFACES

Authors
YAMADA I MATSUO J TOYODA N AOKI T JONES E INSEPOV Z
Citation
I. Yamada et al., NONLINEAR PROCESSES IN THE GAS CLUSTER ION-BEAM MODIFICATION OF SOLID-SURFACES, Materials science & engineering. A, Structural materials: properties, microstructure and processing, 253(1-2), 1998, pp. 249-257
Citations number
15
Categorie Soggetti
Material Science
Journal title
Materials science & engineering. A, Structural materials: properties, microstructure and processing → ACNP
ISSN journal
09215093
Volume
253
Issue
1-2
Year of publication
1998
Pages
249 - 257
Database
ISI
SICI code
0921-5093(1998)253:1-2<249:NPITGC>2.0.ZU;2-G
Abstract
The unique characteristics of gas cluster ion beam processing are revi ewed. Cluster ion beams consisting of hundreds to thousands of atoms h ave been generated from various kinds of gas materials. Multiple colli sions during the impact of accelerated cluster ions upon the substrate surfaces produce fundamentally non-linear bombarding processes. These bombarding characteristics can be applied to shallow ion implantation , high yield sputtering and smoothing, surface cleaning and low temper ature thin him formation. (C) 1998 Elsevier Science S.A. All rights re served.