ENHANCED COHESION OF PHOTO-OXYGENATED FULLERENE FILMS - A NEW OPPORTUNITY FOR LITHOGRAPHY

Authors
HEBARD AF EOM CB FLEMING RM CHABAL YJ MULLER AJ GLARUM SH PIETSCH GJ HADDON RC MUJSCE AM PACZKOWSKI MA KOCHANSKI GP
Citation
Af. Hebard et al., ENHANCED COHESION OF PHOTO-OXYGENATED FULLERENE FILMS - A NEW OPPORTUNITY FOR LITHOGRAPHY, Applied physics. A, Solids and surfaces, 57(3), 1993, pp. 299-303
Citations number
19
Categorie Soggetti
Physics, Applied
Journal title
Applied physics. A, Solids and surfaces → ACNP
ISSN journal
07217250
Volume
57
Issue
3
Year of publication
1993
Pages
299 - 303
Database
ISI
SICI code
0721-7250(1993)57:3<299:ECOPFF>2.0.ZU;2-G
Abstract
The irradiation of sublimed fullerene (C60 and C70) thin films with ul traviolet light in an oxygen-rich ambient has been found to lead to a substantially increased cohesive energy in the fullerene solid. The de creased solubility and lower vapor pressure of the photo-transformed m aterial enables wet (organic solvents) or dry (thermal or photon-induc ed sublimation) development of photo-defined negative images. One micr ometer wide lines with good edge definition are demonstrated. X-ray, i nfrared, optical absorption, and high performance liquid chromatograph y reveal that photo-oxygenated C60 retains its fcc crystal structure b ut with a substantial fraction of the C60 molecules modified with carb onyl (C=O) bonds.