A CARBON-ARC PROCESS FOR TREATMENT OF CF4 EMISSIONS

Light perfluorocarbons, such as carbon tetrafluoride, are produced or emitted from a Variety of processes, including manufacture of aluminum and processing of semiconductor devices. At the same time, the long a tmospheric lifetime and high global warming potential of such compound s makes them an environmental concern. A new process far the abatement of perfluorocarbon emissions using a carbon are plasma was investigat ed, in particular, the conversion of CF4 to C2F4 and higher fluorinate d species, including poly(tetrafluoroethylene) (PTFE) was demonstrated . General features of the reaction chemistry are discussed, including primary reactions to form radicals and ions and secondary reactions to form C2F4 and higher compounds. The conversion efficiencies and produ cts obtained in the reported experiments indicate potential applicabil ity of the process for point source emission control of high global wa rming potential perfluorocarbons.