Jn. Burghartz, SPIRAL INDUCTORS ON SILICON - STATUS AND TRENDS, INTERNATIONAL JOURNAL OF RF AND MICROWAVE COMPUTER-AIDED ENGINEERING, 8(6), 1998, pp. 422-432
The status of the integration, the modeling, and the layout of spiral
inductors on silicon substrates for rf circuits are reviewed. A summar
y of the current research activity in this field is presented. The pos
sible inductor implementations are categorized either as conservative,
following the silicon main stream, or as innovative approaches. It is
concluded that the spiral inductor on silicon is a feasible device an
d finds extensive use in the design of future silicon-based rf circuit
s. (C) 1998 John Wiley & Sons, Inc.