THE OPTICAL DIFFRACTION GRATING AS A REFE RENCE GAUGE STRUCTURE FOR SCANNING ELECTRON-MICROSCOPE

Authors
NOVIKOV YA RAKOV AV STECOLIN IY
Citation
Ya. Novikov et al., THE OPTICAL DIFFRACTION GRATING AS A REFE RENCE GAUGE STRUCTURE FOR SCANNING ELECTRON-MICROSCOPE, Izvestia Akademii nauk SSSR. Seria fiziceskaa, 57(8), 1993, pp. 79-83
Citations number
8
Categorie Soggetti
Physics
Journal title
Izvestia Akademii nauk SSSR. Seria fiziceskaa → ACNP
ISSN journal
03676765
Volume
57
Issue
8
Year of publication
1993
Pages
79 - 83
Database
ISI
SICI code
0367-6765(1993)57:8<79:TODGAA>2.0.ZU;2-X