INORGANIC SENSORS UTILIZING MEMS AND MICROELECTRONIC TECHNOLOGIES

Authors
TULLER HL MLCAK R
Citation
Hl. Tuller et R. Mlcak, INORGANIC SENSORS UTILIZING MEMS AND MICROELECTRONIC TECHNOLOGIES, Current opinion in solid state & materials science, 3(5), 1998, pp. 501-504
Citations number
36
Categorie Soggetti
Material Science","Physics, Applied","Physics, Condensed Matter
Journal title
Current opinion in solid state & materials science → ACNP
ISSN journal
13590286
Volume
3
Issue
5
Year of publication
1998
Pages
501 - 504
Database
ISI
SICI code
1359-0286(1998)3:5<501:ISUMAM>2.0.ZU;2-3
Abstract
The most significant recent advances in achieving sensor sensitivity a nd selectivity have been tied to the integration of thin film sensors with micromachined and/or microelectronic technologies. Arrays of micr o-hotplates, microcantilever beams and metal oxide semiconductor devic es show great promise as chemical sensor platforms exhibiting enhanced selectivity and markedly reduced power dissipation. Microcantilever b eams, presently under development, demonstrate exceptional sensitivity for thermal, optical and magnetic stimuli.