Low-energy electron-induced damage in hexadecanethiolate (HDT) monolay
ers on gold substrates has been investigated using infrared reflection
-absorption spectroscopy (IRAS), angle-resolved near edge X-ray absorp
tion fine structure spectroscopy (NEXAFS), and advancing water contact
angle measurements. HDT films were exposed to electrons of energies 1
0-100 eV and doses between 30 and 14000 mu C/cm(2). The induced damage
was monitored both ''in situ'' by NEXAFS measurements interleaved wit
h electron irradiations and ''ex-situ'' by NEXAFS, IRAS, and contact a
ngle measurements after exposure of the irradiated samples to air. A p
rogressive film damage was observed with increasing electron energy an
d dose of irradiation. This damage was found to occur during irradiati
on in UHV and was not induced by chemical reactions with airborne mole
cules during subsequent exposure of the irradiated films to air. The d
amage starts in the region of the terminal methyl groups of the HDT fi
lms and propagates into the bulk of the film. An analysis of the IRAS
and NEXAFS data shows that the conformational and orientational order
within the HDT film are most sensitive to low-energy electron irradiat
ion. Electron-induced cleavage of C-H and C-C bonds resulting in a par
tial desorption of the film constituents also occurs and leads to form
ation of C=C double bonds in the film as inferred from the appearance
of a pi-resonance in the C 1s NEXAFS spectra. The obtained results ar
e of importance for both the optimization of self-assembled-monolayers
-based lithography processes and for the general understanding of irra
diation-induced changes in organic films.