TITANIUM-OXIDE ALUMINUM-OXIDE MULTILAYER REFLECTORS FOR WATER-WINDOW WAVELENGTHS

Twenty bilayers of titanium oxide and aluminum oxide with the layer-pa ir thickness of 4.43 nm on a silicon substrate were fabricated for nov el multilayer reflectors at water-window wavelengths by an atomic laye r deposition method of controlled growth with sequential surface chemi cal reactions. The high reflectance of over 30% at a wavelength of 2.7 34 nm and an incident angle of 71.8 degrees from the normal incidence was demonstrated experimentally. The full width at half-maximum of the reflectances at 2.734 nm was 0.0381 nm, which corresponds to Delta la mbda/lambda=1.4%. (C) 1997 American Institute of Physics.