The role of dislocation for luminescence in InGaN grown on sapphire su
bstrate by metal organic chemical vapor deposition (MOCVD) method was
investigated by cathodoluminescence (CL) and atomic force microscopy (
AFM). The CL emission area and dark spots between InGaN and GaN layers
in InGaN/GaN single quantum well (SQW) and multiple quantum well (MQW
) structures showed completely one to one correspondence. These result
s indicate that dislocations in InGaN work as non-radiative recombinat
ion centers. Furthermore it was confirmed that the phase separation in
InGaN is caused by spiral growth due to mixed dislocations, and such
a growth mechanism is discussed.