BARIUM TITANATE-BASED CAPACITORS BURIED INTO CERAMIC SUBSTRATES

Burying passive components into the multilayer ceramic substrate can o ffer increased circuit surface area for IC. With the addition of LiF, nonstoichiometric barium titanate BaTi0.975O3 can be well densified af ter sintering at the temperature less than 1000 degrees C. From X-ray diffraction pattern, barium titanate is the main existing crystalline structure. Dielectric constant about 1050 with the dissipation factor 2.3% was obtained for BaTi0.975O3 + 2 Wt% LiF embedded capacitor sinte red at 900 degrees C.