DEVELOPMENT OF A PERIODICALLY STRUCTURED MONOCRYSTALLINE TARGET OF SIFOR X-RAY-EMISSION

We have developed a Si monocrystalline target for producing X-rays by a relativistic electron beam. A grating structure was formed on a Si s ubstrate by silicon micromachining technology with adequate accuracy. The targets were designed to produce 33 keV RTR X-rays from 900 MeV el ectrons. The width of the grating structure is the same as the thickne ss of the Si multi-foil targets, made for INS experiments as well as T omsk experiments, already reported at RREPS95. All of these Si single crystal targets can be tilted at the Bragg angle condition of 33 keV R TR X-rays, to simultaneously produce 33 keV Parametric X Radiation. We can observe both of diffracted RTR and Parametric X Radiation. These results encourage us to study a new type of X-ray source based on a Si monocrystalline target using micromachining technology. (C) 1998 Else vier Science B.V. All rights reserved.