X-RAY-FLUORESCENCE ANALYSIS BY MULTIPLE-GLANCING X-RAY-BEAM EXCITATION

Total-reflection X-ray fluorescence analysis is usually carried out us ing a single X-ray beam to irradiate a sample surface at a glancing an gle from one direction. We have attempted to conduct X-ray fluorescenc e analysis using multiple glancing X-ray beams emitted from a glow dis charge X-ray tube. Fe characteristic X-rays were used as the primary X -rays to irradiate a thin Cr film (sample) on a flat acrylic carrier a t multiple glancing angles. We have concluded that multiple X-ray beam excitation is an effective method for enhancement of X-ray fluorescen ce intensity.