DEVELOPMENT OF INFRARED SPECTROSCOPIC ELLIPSOMETER BY SYNCHRONOUS ROTATION OF THE POLARIZER AND ANALYZER

A type of infrared spectroscopic ellipsometer was designed and constru cted to study the optical properties of materials in the 2.5 similar t o 12.5 mu m wavelength range. The incident angle was continuously vari able between 20 degrees and 90 degrees. The system operations, includi ng data acquisition and reduction, preamplifier gain control, incident angle, wavelength setting and scanning were fully and automatically c ontrolled by a computer. The reflectivity of Au and refractive index o f GaAs bulk material, measured by the infrared ellipsometer, were give n as an example, and a comparison of the results with other methods wa s also given. The experimental skill and main system errors were discu ssed.