We report the first application of sublimation molecular beam epitaxy
to grow uniformly and selectively doped Si:Er layers with Er concentra
tion up to 5 x 10(18) cm(-3). The Hall concentration of electrons is a
bout 10% of total Er contents. The mobility is 300-400 cm(2) V-1 s(-1)
at 300 K. All samples exhibit photoluminescence at 1.537 mu m up to 1
00-140 K.