LIGHT-SCATTERING DIAGNOSTICS OF SILICON PARTICLE GROWTH IN CO2 LASER-DRIVEN REACTIONS

In this work, we report an experimentally simple method for probing th e silicon particle size evolution during the CO2 laser-induced pyrolys is of silane in a flow reactor, based on scattering of He-Ne laser lig ht by a particulate in the reaction flame. The scattering and extincti on measurements have been used to measure nucleation and growth kineti cs of silicon powders within the reaction zone. The experience gained by this technique allowed synthesis of silicon particles with a wide s ize range.