C. Momma et al., BEAM DELIVERY OF FEMTOSECOND LASER-RADIATION BY DIFFRACTIVE OPTICAL-ELEMENTS, Applied physics A: Materials science & processing, 67(5), 1998, pp. 517-520
A novel beam-forming and delivery technique for high-power laser beams
for the generation of well-defined intensity distributions based on d
iffractive optical elements is reported. It will be shown that nonline
ar beam distortions can be minimized by applying this technique in the
field of femtosecond-laser-based micro-machining. As a concrete ex am
ple, the production of high-quality holes in metallic workpieces at at
mospheric pressure will be discussed.