Ka. Gruss et al., CHARACTERIZATION OF ZIRCONIUM NITRIDE COATINGS DEPOSITED BY CATHODIC ARC SPUTTERING, Surface & coatings technology, 107(2-3), 1998, pp. 115-124
Polycrystalline ZrN coatings with a composition of 58.41 at.% Zr and 4
1.59 at.% N were deposited by cathodic are evaporation on to Incoloy 8
25, Hastelloy C22 and Titanium Grade 12 metal substrates. Analyses of
the coatings by scanning electron microscopy and Auger electron spectr
oscopy revealed the presence of 1-8-mu m-diameter macroparticles compo
sed of Zr metal. Compressive stresses of 4.06, 3.88 and 2.69 GPa were
measured via X-ray diffraction in the coatings deposited on Inc., Hast
. and Ti. substrates, respectively. Values for Young's modulus and har
dness of 458 and 27.65 GPa, respectively, were obtained via nanoindent
ation. Studies of the interfacial chemistry via Auger electron spectro
scopy and transmission electron microscopy revealed chemically abrupt
interfaces and good compositional uniformity throughout the thickness
of the zirconium nitride coatings. (C) 1998 Elsevier Science S.A. All
rights reserved.