CHARACTERIZATION OF ZIRCONIUM NITRIDE COATINGS DEPOSITED BY CATHODIC ARC SPUTTERING

Polycrystalline ZrN coatings with a composition of 58.41 at.% Zr and 4 1.59 at.% N were deposited by cathodic are evaporation on to Incoloy 8 25, Hastelloy C22 and Titanium Grade 12 metal substrates. Analyses of the coatings by scanning electron microscopy and Auger electron spectr oscopy revealed the presence of 1-8-mu m-diameter macroparticles compo sed of Zr metal. Compressive stresses of 4.06, 3.88 and 2.69 GPa were measured via X-ray diffraction in the coatings deposited on Inc., Hast . and Ti. substrates, respectively. Values for Young's modulus and har dness of 458 and 27.65 GPa, respectively, were obtained via nanoindent ation. Studies of the interfacial chemistry via Auger electron spectro scopy and transmission electron microscopy revealed chemically abrupt interfaces and good compositional uniformity throughout the thickness of the zirconium nitride coatings. (C) 1998 Elsevier Science S.A. All rights reserved.