Silicon clusters of nanoscale sizes (10-100 nm) were produced in a sil
ane jet under conditions of gas-phase CO2-laser synthesis. The composi
tion, the sizes of particles, and the size variance of silicon powders
have been investigated by means of scanning electron microscopy for d
ifferent parameters of synthesis. The method of X-ray diffraction anal
ysis has been applied to investigate the morphology of nanoclusters co
nsisting of a crystalline core and an amorphous shell. Conditions for
obtaining nanoparticles of required sizes and dispersion with a variab
le ratio of crystalline and amorphous components are determined.