INFLUENCE OF VACUUM RAPID THERMAL ANNEALING ON SOME PROPERTIES OF QUARTZ RESONATORS

The influence of rapid thermal annealing (RTA) on the parameters of qu artz resonators and their amplitude-frequency characteristics has been investigated. The resonators were an AT-cut quartz substrate with Al- electrodes 120 nm thick deposited by electron beam evaporation at 1.10 (-5) mbar. The samples were subjected to RTA at the temperature of the heater 700 degrees C, 800 degrees C and 900 degrees C for a time from 15 s to 180 s in vacuum at 5.10(-5) mbar. A correlation between the e lectrical parameters of the resonators and their amplitude-frequency c haracteristics from one side and RTA conditions from another side have been established. The conditions under which the quartz resonators pa rameters were improved have been found. (C) 1998 Elsevier Science Ltd All rights reserved.