EFFECT OF PLASMA POLYMERIZATION CONDITIONS ON THE HUMIDITY SORPTIVE PROPERTIES OF THIN-FILMS OBTAINED FROM HEXAMETHYLDISILOXANE IN GLOW-DISCHARGE

The humidity sorptive powers of polymer coatings deposited on quartz r esonators has been studied. The polymer was obtained from hexamethyldi siloxane by plasma polymerization under different operating conditions of glow discharge current density, gas phase pressure, polymer film t hickness and modification of the polymer surface in an ammonia plasma. The sensitivity of the films to humidity was enhanced by operating at the highest current density and pressure and by raising the film thic kness and exposure to the ammonia plasma. (C) 1998 Elsevier Science Lt d. All rights reserved.