PREPARATION AND PROPERTIES OF OXIDE-FILMS OF THE RARE-EARTH-METALS

The properties of films of rare earth metal oxides obtained by evapora tion of the metal in an oxygen atmosphere are given. The deposits were highly dispersed and crystallized with a cubic type-Mn2O3 structure. The data obtained include. width of the forbidden band (4-6 eV), refra ctive index (1.89-2. 05), specific electrical resistance (10(14)-10(15 ) Omega.cm), breakdown voltage (10(6)-10(7) V/cm), etc. It is shown th at films of REM oxides are promising as passive elements of microcircu its, transparent coatings, temperature and heat-flow sensors. These ex amples by far do nor exhaust the possibilities for use of such films.