VISIBLE PHOTOLUMINESCENCE FROM PLANAR AMORPHOUS-SILICON NITRIDE MICROCAVITIES

Fabry-Perot microcavities were used for the enhancement and inhibition of photoluminescence (PL) in a hydrogenated amorphous silicon nitride (a-SiNx:H) microcavity fabricated with and without ammonia. A planar microcavity was realized that included a metallic back mirror and an a -SiNx:H-air or a metallic front mirror. The PL extends from the red pa rt of the spectrum to the near infrared for the samples grown without ammonia. The PL is in the blue-green part of the spectrum for the samp les grown with ammonia. The PL amplitude is enhanced and the PL linewi dth is reduced with respect to those in bulk a-SiNx:H. The numerically calculated transmittance, reflectance, and absorbance spectra agree w ell with the experimentally measured spectra. (C) 1998 Optical Society of America [S0740-3224(98)00211-2] OCIS codes: 230.5750, 250.5230, 31 0.0310.