EFFECT OF ATMOSPHERE ON RELIABILITY OF PASSIVATED 0.15 MU-M INALAS INGAAS HEMTS/

Citation
M. Dammann et al., EFFECT OF ATMOSPHERE ON RELIABILITY OF PASSIVATED 0.15 MU-M INALAS INGAAS HEMTS/, Electronics Letters, 34(21), 1998, pp. 2064-2066
Citations number
5
Categorie Soggetti
Engineering, Eletrical & Electronic
Journal title
ISSN journal
00135194
Volume
34
Issue
21
Year of publication
1998
Pages
2064 - 2066
Database
ISI
SICI code
0013-5194(1998)34:21<2064:EOAORO>2.0.ZU;2-2
Abstract
The influence of ambient atmosphere on the long term stability of InP- based HEMTs has been investigated. By performing accelerated stress te sts at elevated temperature the authors found that the electrical para meter drift is much faster in air than in nitrogen. The importance of a stabilisation bake in nitrogen after the fabrication process is demo nstrated.