Swk. Choi et Rj. Puddephatt, COBALT-PALLADIUM AND COBALT-PLATINUM BILAYER FILMS FORMED BY CHEMICAL-VAPOR-DEPOSITION, Chemistry of materials, 9(5), 1997, pp. 1191-1195
The complexes [Co-3(CO)(9)CCl], [Co-3(CO)(9)CH], [Co-2(CO)(6)(HC=CPh)]
and [Co-2(CO)(6)(HC+C-t-Bu)] are shown to be excellent precursors for
CVD of pure cobalt films, when using hydrogen as carrier gas. These c
ompounds all possess good air and moisture stability, have high volati
lity, and are easy to prepare, store, and handle. Using these precurso
rs and the known palladium and platinum precursors [Pd(hfac)(2)] and [
PtMe2(COD)], it has been shown that bilayer films glass/Co/Pd, glass/P
d/Co, glass/Co/Pt, and glass/Pt/Co can be grown easily. There is a sha
rp boundary and good adhesion between the two metal layers, suggesting
that this method may be suitable for the formation of bilayer films f
or magnetooptical applications.