[CA(THD)(2)(TETRAEN)] - A MONOMERIC PRECURSOR FOR DEPOSITION OF CAS THIN-FILMS

Citation
T. Hanninen et al., [CA(THD)(2)(TETRAEN)] - A MONOMERIC PRECURSOR FOR DEPOSITION OF CAS THIN-FILMS, Chemistry of materials, 9(5), 1997, pp. 1234-1240
Citations number
49
Categorie Soggetti
Chemistry Physical","Material Science
Journal title
ISSN journal
08974756
Volume
9
Issue
5
Year of publication
1997
Pages
1234 - 1240
Database
ISI
SICI code
0897-4756(1997)9:5<1234:[-AMPF>2.0.ZU;2-2
Abstract
[Ca-3(thd)(6)] (thd = 2,2,6,6-tetramethyl-3,5-heptanedionato) dissolve d in hexane and in the presence of tetraethylenepentamine (tetraen) cr ystallizes as a 1:1 [Ca(thd)(2)(tetraen)] adduct complex in the orthor hombic Peen space group with a 10.874(2) Angstrom, b = 15.480(3) Angst rom, c = 20.866(4) Angstrom, and Z = 4. The molecule is monomeric with an 8-coordinated calcium atom. The adduct complex volatilized at lowe r temperature than the nonadducted complex. [Ca(thd)(2)(tetraen)] can be utilized as a precursor in growth CaS thin films by the atomic laye r epitaxy method. The growth rate with [Ca(thd)(2)(tetraen)] is lower (0.43 Angstrom/cycle) than that with [Ca-3(thd)(6)] (0.50 Angstrom/cyc le).