M. Okkerse et al., A SURFACE AND A GAS-PHASE MECHANISM FOR THE DESCRIPTION OF GROWTH ON THE DIAMOND(100) SURFACE IN AN OXY-ACETYLENE TORCH REACTOR, Journal of applied physics, 84(11), 1998, pp. 6387-6398
A gas-phase and a surface mechanism were developed, suitable for multi
dimensional simulations of diamond oxy-acetylene torch reactors. The g
as-phase mechanism was obtained by reducing a 48 species combustion ch
emistry mechanism to a 27 species mechanism with the aid of sensitivit
y analysis. The surface mechanism for growth on monocrystalline (100)
surfaces developed, was based on literature quantum-mechanical calcula
tions by Skokov et al. It consists of 67 elementary reaction steps and
41 species, and contains CH3 and C2H2 as gas-phase growth precursors
and atomic hydrogen and oxygen to etch carbon from the surface. The ga
s-phase and surface chemistry models were tested in one-dimensional si
mulations, yielding dependencies of the growth rate on feed compositio
n and surface temperature that are in qualitative agreement with the e
xperiments. A more detailed study of the surface chemistry showed that
, compared to CH3, acetylene contributes very little to diamond growth
. Furthermore, molecular and atomic oxygen do not affect the diamond s
urface as much as atomic hydrogen because of their low concentrations.
(C) 1998 American Institute of Physics. [S0021-8979(98)05423-1].