MONTE-CARLO MODELING OF CATHODOLUMINESCENCE GENERATION USING ELECTRON-ENERGY-LOSS CURVES

This work demonstrates the validity of approximating cathodoluminescen ce generation throughout the electron interaction volume by the total electron energy loss profile. The energy loss profiles in multilayer s pecimens were accurately calculated using the Monte Carlo simulation C ASINO. Resolution of cathodoluminescence images can be estimated from the electron beam spot diameter, the electron penetration range, and t he minority carrier diffusion length.