DESIGNS OF MULTITARGET CAROUSELS FOR PULSED-LASER DEPOSITION SYSTEMS

For different applications of the pulsed-laser deposition (PLD) techni que and for particular PLD chambers, different multi-target carousels are required. Here we describe three designs of a multi-target carouse l for PLD which present separately the advantages of sufficient target cooling, reduced probability of jamming in operation and an adjustabl e target-to-flange distance. These carousels can be applied in various simple and small PLD systems where commercial products are not suitab le, as well as in laser-molecular-beam-epitaxy (L-MBE) systems. They a re of simple structure, low cost and may be constructed in a normal wo rkshop.