SEMICONDUCTING YBACUO PYROELECTRIC INFRARED DETECTORS ON SUSPENDED SI3N4 FILMS

Authors
GRAY JE BUTLER DP CELIKBUTLER Z
Citation
Je. Gray et al., SEMICONDUCTING YBACUO PYROELECTRIC INFRARED DETECTORS ON SUSPENDED SI3N4 FILMS, Electronics Letters, 34(22), 1998, pp. 2164-2166
Citations number
9
Categorie Soggetti
Engineering, Eletrical & Electronic
Journal title
Electronics Letters → ACNP
ISSN journal
00135194
Volume
34
Issue
22
Year of publication
1998
Pages
2164 - 2166
Database
ISI
SICI code
0013-5194(1998)34:22<2164:SYPIDO>2.0.ZU;2-8
Abstract
Uncooled, micromachined pyroelectric infrared detectors based on semic onducting YBaCuO were fabricated and characterised at room temperature . The detectors were fabricated with CMOS compatible techniques that d emonstrate a future ability to fabricate low-cost focal plane arrays. Pyroelectric coefficients were measured to be as high as 4.1 mu C/cm(2 ) K and detectivities over 10(8) cm.Hz(1/2)/W were measured.