PRECONDITIONED RICHARDSON NUMERICAL-METHOD FOR THERMAL-ANALYSIS IN X-RAY-LITHOGRAPHY WITH CYLINDRICAL GEOMETRY

X-ray lithography is an important technique in microfabrication used t o obtain structures and devices with a high aspect ratio. In this stud y, we develop a three-dimensional numerical method for obtaining the s teady state temperature profile in an X-ray irradiation process by usi ng a hybrid finite element-finite difference scheme and a precondition ed Richardson method for the Poisson equation at the microscale. A dom ain decomposition algorithm is then obtained based on a parallel Gauss ian elimination for solving block tridiagonal linear systems Numerical results show that such a method is efficient.