W. Dai et R. Nassar, PRECONDITIONED RICHARDSON NUMERICAL-METHOD FOR THERMAL-ANALYSIS IN X-RAY-LITHOGRAPHY WITH CYLINDRICAL GEOMETRY, Numerical heat transfer. Part A, Applications, 34(6), 1998, pp. 599-616
X-ray lithography is an important technique in microfabrication used t
o obtain structures and devices with a high aspect ratio. In this stud
y, we develop a three-dimensional numerical method for obtaining the s
teady state temperature profile in an X-ray irradiation process by usi
ng a hybrid finite element-finite difference scheme and a precondition
ed Richardson method for the Poisson equation at the microscale. A dom
ain decomposition algorithm is then obtained based on a parallel Gauss
ian elimination for solving block tridiagonal linear systems Numerical
results show that such a method is efficient.