Free-standing polymeric optical waveguide films with 45 degrees mirror
s and MT connectors (mechanically transferable spacing connectors) wer
e fabricated by spin-coating, photolithography and reactive ion etchin
g. The spin-coated films had sufficient thickness controllability and
surface smoothness for them to be used to fabricate multimode waveguid
es with a low loss of less than 0.02 dB/cm at 0.83 mu m using deuterat
ed-polymethylmethacrylate for the core and UV-cured resin for the clad
ding. For application to optical interconnections, a 45 degrees mirror
was formed in the waveguide by using a 90 degrees V-shaped diamond bl
ade, and the mirror loss was 0.3-0.7 dB depending on the measurement c
onditions. Free-standing polymeric waveguide films were mounted in an
MT-compatible connector made of Pyrex glass by using UV curable resin.
The insertion loss was about 1 dB which was sufficiently low for prac
tical use. (C) 1998 Published by Elsevier Science Ltd. All rights rese
rved.