ON THE CORRELATION BETWEEN CRYSTALLINITY OF PLATINUM BOTTOM ELECTRODEAND THAT OF MOD DERIVED PZT THIN-FILMS

Growth of well (111)-oriented Pt and Pt/Ti films on SiO2/Si(111) subst rates and crystallinity of PZT films grown on the Pt(111)/SiO2/Si(111) and Pt(111)/Ti/SiO2/Si(111) substrates have been investigated. It was found by X-ray diffraction analysis that well (111)-oriented Pt film with a best full-width at half maximum (FWHM) of 0.28 degrees was grow n by the DC sputtering method. PZT films were prepared by metallo-orga nic decomposition(MOD) on Pt(111)-coated SiO2/Si(111) substrates. The crystallinity of the PZT films improved as the FWHM of the Pt(111) dif fraction peak decreased. The best FWHM obtained for a PZT film grown o n a Pt(111)/Ti/SiO2/Si(111) substrate was 0.33 degrees.