DEPTH DISTRIBUTION OF RARE-EARTH IONS IMPLANTED INTO KTIOPO4 DETERMINED BY THE RUTHERFORD BACKSCATTERING TECHNIQUE

Potassium titanyl phosphates (KTiOPO4 or KTP) samples were implanted w ith rare earth ions such as Tm+, Er+, and Yb+. The ion energy implante d was varied from 100 keV up to 400 keV. The fluence was 1-2x10(15) io ns/cm(2). The depth distributions of the implanted rare earth ions wer e determined using the Rutherford backscattering technique. The experi mental data were compared with TRIM (transport of ions in matter) code . It is found that for Tm+ and Er+ the experimental mean projected ran ges are in relatively good agreement with values calculated by the TRI M code after taking into account inelastic effects in the energy trans fer. But that in the case of Yb+ the ranges are overestimated by theor y, anyway the deviation of experimental values fi om calculated one is less than 9% for all cases. The deconvoluted experimental range strag glings are in all cases higher than the calculated values. (C) 1998 El sevier Science B.V. All rights reserved.