THERMODESORPTION MASS-SPECTROMETRY STUDY OF THE ADSORPTION OF SB ON MISORIENTED SI(111)

Adsorption of Sb on a misoriented Si(lll) surface is investigated by t hermodesorption mass spectrometry (TD-MS). The spectra confirm the exi stence, in the submonolayer range, of new adsorption sites induced by the presence of steps, previously shown by Auger spectroscopy thermode sorption (TD-AES) and tentatively attributed, through simulations, to molecular adsorption at the steps rather than dissociative on the terr aces. The present TD-MS measurements completely confirm this interpret ation, and also give new information on the nature of the species leav ing the surface (essentially Sb,) and on their emission laws (orientat ional desorption). (C) 1998 Elsevier Science B.V. All rights reserved.