We have used an atomic force microscope to make precision measurements
of the Casimir force between a metallized sphere of diameter 196 mu m
and flat plate. The force was measured for plate sphere surface separ
ations from 0.1 to 0.9 mu m. The experimental results are consistent w
ith present theoretical calculations including the finite conductivity
, roughness, and temperature corrections. The root mean square average
deviation of 1.6 pN between theory and experiment corresponds to a 1%
deviation at the smallest separation. [S0031-9007(98)07763-1].