Sm. Yoon et al., ELECTRICAL-PROPERTIES OF LA0.7SR0.3COO3 PB(ZR0.52TI0.48)O-3/LA0.7SR0.3COO3 THIN-FILM CAPACITORS FORMED ON MGO SUBSTRATES USING THE SOL-GEL METHOD/, JPN J A P 2, 37(8A), 1998, pp. 936-938
Sol-gel derived La0.7Sr0.3CoO3/Pb(Zr0.52Ti0.18)O-3 (PZT)/La0.7Sr0.3CoO
3(LSCO) ferroelectric capacitors were fabricated on MgO(100) substrate
s. In order to avoid degradation of the PZT film during the high-tempe
rature crystallization process of the top LSCO electrode, amorphous ph
ase LSCO was used in the sol-gel method. These capacitors showed good
ferroelectric hysteresis loops and no significant degradation of switc
hable polarization was observed after 1 x 10(9) switching cycles.