Al. Vasiliev et al., INTERFACIAL INTERACTIONS OF YBA2CU3O7-X THIN-FILMS ON SI SUBSTRATES WITH POLYCRYSTALLINE Y STABILIZED ZRO2 BUFFER LAYERS, Physica. C, Superconductivity, 253(3-4), 1995, pp. 297-307
The interfacial interactions of high-temperature superconducting YBa2C
u3O7-x (YBCO) thin films on Si substrates with polycrystalline yttrium
-stabilized ZrO2 (YSZ) buffer layers have been characterized using tra
nsmission electron microscopy in combination with X-ray microanalysis.
It has been found that polycrystalline YSZ buffer layers do not preve
nt detrimental interdiffusion between a Si substrate and a YBCO film d
uring film deposition at 700 to 750 degrees C. Diffusion is relatively
fast along the grain boundaries of the columnar-structured YSZ buffer
layer and results in the formation of Cu rich precipitates at the YSZ
/Si interface and in amorphous regions at the YBCO/BaZrO3/YSZ interfac
e. In addition, a local surface roughness of the YSZ upper interface g
ives rise to significant deviation from the c-axis orientation of the
YBCO film ([001] axis of YBCO parallel to the surface normal of the Si
substrate). It is therefore important to maintain a smooth surface as
well as an epitaxial growth of the YSZ buffer layer.