HIGH-RESOLUTION PERIODICALLY POLED STRUCTURE IN DIAZO-DYE-SUBSTITUTEDPOLYMER FILM BASED ON DIRECT ELECTRON-BEAM WRITING TECHNIQUE

A periodically poled pattern in diazo-dye-substituted nonlinear optica l polymer film is fabricated by direct electron-beam (EB) writing. It is found that the second- order nonlinearity of corona-poled polymer t hin film is erased after EB irradiation. Moreover, the exposed region can be easily removed by conventional wet development. A high- resolut ion periodically poled structure (i. e., chi((2)) grating) with a peri od of 0.60 mu m is demonstrated based on the direct EB writing techniq ue. (C) 1998 American Institute of Physics. [S0003-6951(98)00747-5].