GROWTH AND ORIENTATION OF DIAMOND CRYSTAL THIN-FILMS OBTAINED BY THE COMBUSTION-FLAME METHOD

The dependence of the texture formation and crystal-growth mechanism o f diamond films on the deposition parameters have been studied. The sa mples were prepared by the combustion-dame method under various growth conditions, Results show that the structure and surface morphology of the diamond films depend on the following deposition parameters: temp erature distribution on the substrate, C2H2/O-2 gas ratio, and particu larly the incident substrate angle alpha, which describes the angle be tween the incident acetylene feather and the substrate surface. Scanni ng electron microscopy (SEM) observations and Raman spectrometry (RS) analysis of a variety of samples show that epitaxial, textured diamond films with {111} facets were formed with a 90 degrees incident angle. When the incident angle is 60 degrees, the films consist of {100} fac ets. The quality of the diamond films increases as the incident angle decreases. In the present paper, we discuss the growth ratio and the q uality of diamond films as a function of the incident angle.