We have studied the dynamic behavior of the Ge(001) surface during spu
ttering in situ and in real time using synchrotron X-ray diffraction.
We find two dynamic regimes as a function of surface temperature and s
putter current which are separated by a sharp transition. The boundary
between these two regimes follows an Arrhenius behavior with an activ
ation energy of about 1 eV for the relevant diffusion process.