RESONANT MECHANICAL MAGNETIC SENSOR IN STANDARD CMOS

Citation
B. Eyre et al., RESONANT MECHANICAL MAGNETIC SENSOR IN STANDARD CMOS, IEEE electron device letters, 19(12), 1998, pp. 496-498
Citations number
10
Categorie Soggetti
Engineering, Eletrical & Electronic
ISSN journal
07413106
Volume
19
Issue
12
Year of publication
1998
Pages
496 - 498
Database
ISI
SICI code
0741-3106(1998)19:12<496:RMMSIS>2.0.ZU;2-A
Abstract
A novel micromechanical magnetic sensor has been built and tested. The field is detected by measuring the vibration amplitude of a mechanica l Lorentz force oscillator, This device is made from a standard 2-mu m CMOS fabrication process with a post-processing etch step to undercut and release the sensor. When operated at the resonant frequency of th e mechanical system, a sensitivity of 20 mu V/G was measured.