RESONANT MECHANICAL MAGNETIC SENSOR IN STANDARD CMOS

A novel micromechanical magnetic sensor has been built and tested. The field is detected by measuring the vibration amplitude of a mechanica l Lorentz force oscillator, This device is made from a standard 2-mu m CMOS fabrication process with a post-processing etch step to undercut and release the sensor. When operated at the resonant frequency of th e mechanical system, a sensitivity of 20 mu V/G was measured.