X-RAY CONVERTERS FOR RADIATION TREATMENT OF THIN-FILMS

The energy absorbed in thin films of selected materials bombarded by x rays emitted in the braking of low-energy electrons (E-0<500 keV) in converters with various atomic numbers (Z = 29-73) is calculated by th e Monte Carlo method. The program takes into account both of the K-she ll ionization mechanisms that lead to emission of characteristic photo ns as a result of electron impact and as a result of the photoelectric effect, and the characteristic radiation is shown to make a large con tribution to the absorbed energy in thin films. Calculations show that the proper choice of material and thickness of the converter affords a two- to fivefold increase in the energy of the x radiation absorbed in thin films of semiconductor materials. (C) 1998 American Institute of Physics. [S1063-7842(98)01911-4].