CALCULATION OF SPUTTERING YIELDS UNDER HIGH-FLUENCE BOMBARDMENT OF A CUXN1-X ALLOY

Under 2 keV Ar ion bombardment of a CuxNi1-x alloy, at high fluence an d at low temperature, Cu and Ni sputtering yields, the total sputterin g yield (Cu+Ni yields), and the sputtering yields from the first surfa ce layer and from beneath this layer for Cu and Ni, have been separate ly calculated by an improved kinetic BIGS (bombardment-induced Gibbsia n segregation) model. Calculations indicate that these sputtering yiel ds are strongly dependant on the Cu (segregating species) bulk composi tion. A cause of the possible correlation between sputtering angular d istribution and bulk composition of the segregating species is also an alysed for the segregating system. (C) 1998 Elsevier Science Ltd. All rights reserved.