QUANTITATIVE AES - VIII - ANALYSIS OF AUGER-ELECTRON INTENSITIES FROMELEMENTAL DATA IN A DIGITAL AUGER DATABASE

An analysis of the correlation of theoretical predictions for Auger el ectron intensities is made with the experimental data of the high-reso lution digital Auger database. This analysis covers single-element sam ples measured for 5 keV and 10 keV beam energies. The spectral data ar e for wide scans of 20-2500 eV at 1 eV energy resolution and 1 eV ener gy intervals, as well as narrow scans at 0.25 eV energy resolution and 0.1 eV energy intervals. All spectra have the instrument intensity/en ergy response function removed so that peak areas are measured in unit s of electrons emitted per steradian per incident electron. Correlatio ns are made for calculations of the intensities using the cross-sectio n of Casnati et al. applied to the K, L, M and N shells, the backscatt ering factor of Shimizu and the inelastic mean free paths of Tanuma et al. The intensities, summed over all peaks relating to initial ioniza tions in shells of a given principal quantum number, correlate with th e theoretical predictions with no fitting parameters, with a mean erro r of a factor of only 1.04 and a scatter factor of 1.3. Expressions ar e provided to extend the database to other beam energies and angles of incidence. General equations are also provided to extract new sensiti vity factors for the average matrix, which lead to matrix factors that effectively reduce to unity for peaks above 175 eV, instead of the tr aditional matrix factors that cover a range of 0.1-7.2. These sensitiv ity factors for the average matrix may be used for peak areas, peak he ights or differential peak-to-peak intensities. In the latter two case s, spectral broadening may be necessary to obtain accurate results. (C ) 1998 John Wiley & Sons, Ltd.