LOW-FRICTION TIN-MOS2 COATINGS PRODUCED BY DC MAGNETRON CODEPOSITION

Coatings of the overall composition TiNx(MoSy)(z) have been produced b y dc co-sputter deposition from a single unbalanced magnetron target c omposed of TiN and MoS2 halves. Compositional variation was obtained b y placing stainless steel substrates at various positions with respect to the target. X-ray diffraction and photoelectron spectroscopy showe d that the coatings were composed of distinct TiNx and MoSy phases in the form of a nanodispersive system. Pin-on-disk tribometry and nanoin dentation demonstrated that coatings with a hardness exceeding 20 GPa and friction coefficients of about 0.1 could be produced by selecting suitable composition and deposition parameters. These coatings show po tential for improved endurance with respect to current MoS2-based low- friction coatings and may be suitable for use in severe conditions, fo r example, as cutting tool coatings for dry machining. (C) 1998 Elsevi er Science S.A. All rights reserved.