PREPARATION AND CHARACTERIZATION OF SOL-GEL DERIVED CH3SIO3 2-SIO2 THICK-FILM/

Authors
CAO B ZHU CS
Citation
B. Cao et Cs. Zhu, PREPARATION AND CHARACTERIZATION OF SOL-GEL DERIVED CH3SIO3 2-SIO2 THICK-FILM/, JOURNAL OF MATERIALS SCIENCE & TECHNOLOGY, 14(6), 1998, pp. 523-526
Citations number
6
Categorie Soggetti
Material Science","Metallurgy & Metallurigical Engineering
Journal title
JOURNAL OF MATERIALS SCIENCE & TECHNOLOGY → ACNP
ISSN journal
10050302
Volume
14
Issue
6
Year of publication
1998
Pages
523 - 526
Database
ISI
SICI code
1005-0302(1998)14:6<523:PACOSD>2.0.ZU;2-9
Abstract
A large size CH3SiO3/2-SiO2 self-sustained film with the thickness ran ging from 50 to 1000 mu m was prepared through sol-gel method by adopt ing CH3Si(OC2H5)(3) and Si(OC2H5) as precursors. In this paper, the pr eparation processes of this thick film are discussed in detail and XRD technique was adopted for the identification of oligomer solution. Al so, IR and AFM techniques were used to investigate the film structure and surface morphology.